Patent Assignment
Reel/Frame 053823/0077
Assignment of Assignor's Interest
Recorded: 2020-09-18
Pages: 2
Assignor
WANG, SHIANG-BAU
Executed: 2020-08-24
Assignee
TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
8, LI-HSIN RD. 6, HSINCHU SCIENCE PARK, HSINCHU, 300-78, TAIWAN
Covered Property
(1)
Partial Directional Etch Method and Resulting Structures