Patent Assignment
Reel/Frame 053824/0095
Assignment of Assignor's Interest
Recorded: 2020-09-20
Pages: 9
Assignors
FELER, YOEL
Executed: 2020-02-23
GHINOVKER, MARK
Executed: 2020-08-05
SHAPHIROV, DIANA
Executed: 2020-03-16
GUREVICH, EVGENI
Executed: 2020-03-19
LEVINSKI, VLADIMIR
Executed: 2020-02-25
Assignee
KLA CORPORATION
ONE TECHNOLOGY DRIVE, MILPITAS, CALIFORNIA, 95035
Covered Property
(1)
Imaging Overlay Targets Using Moire Elements and Rotational Symmetry Arrangements