Patent Assignment
Reel/Frame 053830/0273
Assignment of Assignor's Interest
Recorded: 2020-09-21
Pages: 6
Assignors
PANDEY, NITESH
Executed: 2019-02-07
AKBULUT, DUYGU
Executed: 2019-02-07
POLO, ALESSANDRO
Executed: 2019-01-21
GOORDEN, SEBASTIANUS ADRIANUS
Executed: 2019-01-21
Assignee
ASML NETHERLANDS B.V.
P.O. BOX 324, VELDHOVEN, 5500 AH, NETHERLANDS
Covered Property
(1)
Apparatus and Methods for Determining the Position of a Target Structure on a Substrate