Patent Assignment
Reel/Frame 053841/0113
Assignment of Assignor's Interest
Recorded: 2020-09-22
Pages: 6
Assignors
CHUNG, SANGGYO
Executed: 2020-09-10
LEE, JISEUNG
Executed: 2020-09-10
EOM, KYOUNGHA
Executed: 2020-09-11
LEE, HYUNCHUL
Executed: 2020-09-15
Assignee
SAMSUNG ELECTRONICS CO., LTD.
129, SAMSUNG-RO, YEONGTONG-GU, SUWON-SI, GYEONGGI-DO, 16677, KOREA, REPUBLIC OF
Covered Property
(1)
Methods of Cutting a Fine Pattern, Methods of Forming Active Patterns Using the Same, and Methods of Manufacturing a Semiconductor Device Using the Same