Patent Assignment
Reel/Frame 053843/0298
Assignment of Assignor's Interest
Recorded: 2020-09-22
Pages: 3
Assignors
MATTINEN, MIIKA
Executed: 2018-11-12
RITALA, MIKKO
Executed: 2018-11-12
LESKELÄ, MARKKU
Executed: 2018-11-12
Assignee
ASM IP HOLDING B.V.
VERSTERKERSTRAAT 8, ALMERE, 1322 AP, NETHERLANDS
Covered Property
(1)
Methods for Depositing a Transition Metal Chalcogenide Film on a Substrate by a Cyclical Deposition Process