Patent Assignment
Reel/Frame 053845/0620
Assignment of Assignor's Interest
Recorded: 2020-09-22
Pages: 3
Assignor
CHEN, YI-LUN
Executed: 2020-08-25
Assignee
TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
NO. 8, LI-HSIN RD. 6, HSINCHU SCIENCE PARK, HSINCHU, 300-77, TAIWAN
Covered Property
(1)
Silicon Carbide Oxide Hard Mask for Reducing Dishing Effects