Patent Assignment
Reel/Frame 053861/0521
Assignment of Assignor's Interest
Recorded: 2020-09-23
Pages: 4
Assignors
OKUYAMA, YUTAKA
Executed: 2020-09-10
OHMORI, TAKESHI
Executed: 2020-09-09
TOYODA, YASUTAKA
Executed: 2020-09-10
Assignee
HITACHI HIGH-TECH CORPORATION
17-1, TORANOMON 1-CHOME, MINATO-KU, TOKYO, JAPAN
Covered Property
(1)
Dimension Measurement Apparatus, Dimension Measurement Program, and Semiconductor Manufacturing System