Patent Assignment
Reel/Frame 053880/0456
Assignment of Assignor's Interest
Recorded: 2020-09-25
Pages: 7
Assignors
LIM, HONGTAEK
Executed: 2020-09-09
KIM, JUNGHYEON
Executed: 2020-08-31
SHIN, SANGGON
Executed: 2020-08-31
FEYGENSON, OLEG
Executed: 2020-08-31
LEE, KYUHO
Executed: 2020-08-27
HAN, DONGHOON
Executed: 2020-09-09
HONG, KWANGPYO
Executed: 2020-09-09
Assignee
SAMSUNG ELECTRONICS CO., LTD.
129, SAMSUNG-RO, YEONGTONG-GU, SUWON-SI, GYEONGGI-DO, 16677, KOREA, REPUBLIC OF
Covered Property
(1)
Edge Ring, Substrate Processing Apparatus Having the Same and Method of Manufacturing Semiconductor Device Using the Apparatus