Patent Assignment
Reel/Frame 053891/0962
Assignment of Assignor's Interest
Recorded: 2020-09-25
Pages: 3
Assignor
HAYASHI, DAISUKE
Executed: 2020-09-15
Assignee
TOKYO ELECTRON LIMITED
3-1 AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Substrate Support and Plasma Processing Apparatus