Patent Assignment
Reel/Frame 053912/0007
Assignment of Assignor's Interest
Recorded: 2020-09-29
Pages: 3
Assignee
TOKYO ELECTRON LIMITED
3-1 AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Substrate Processing Method, Method for Manufacturing Semiconducor Device, and Plasma Processing Apparatus