Patent Assignment
Reel/Frame 053914/0255
Assignment of Assignor's Interest
Recorded: 2020-09-29
Pages: 7
Assignors
AZUMO, SHUJI
Executed: 2020-09-15
IKE, SHINICHI
Executed: 2020-09-15
KAWANO, YUMIKO
Executed: 2020-09-15
Assignee
TOKYO ELECTRON LIMITED
AKASAKA BIZ TOWER, 3-1 AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Film Forming Method for Forming Self-Assembled Monolayer on Substrate