Patent Assignment
Reel/Frame 053915/0055
Assignment of Assignor's Interest
Recorded: 2020-09-29
Pages: 11
Assignors
IDE, HIROYUKI
Executed: 2020-09-23
SHITE, HIDEO
Executed: 2020-09-16
YOSHIHARA, KOUSUKE
Executed: 2020-09-17
Assignee
TOKYO ELECTRON LIMITED
3-1, AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Liquid Processing Device and Liquid Processing Method