Patent Assignment
Reel/Frame 053918/0670
Assignment of Assignor's Interest
Recorded: 2020-09-29
Pages: 3
Assignor
SASAKI, RYO
Executed: 2020-09-29
Assignee
TOKYO ELECTRON LIMITED
3-1 AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Plasma Processing Apparatus