Patent Assignment
Reel/Frame 053952/0851
Assignment of Assignor's Interest
Recorded: 2020-10-01
Pages: 9
Assignors
STEVENS, ERIC CHRISTOPHER
Executed: 2020-06-02
ZOPE, BHUSHAN
Executed: 2020-06-01
SWAMINATHAN, SHANKAR
Executed: 2020-06-24
DEZELAH, CHARLES
Executed: 2020-06-04
XIE, QI
Executed: 2020-06-03
ALESSIO VERNI, GIUSEPPE
Executed: 2020-06-03
Assignee
ASM IP HOLDING B.V.
VERSTERKERSTRAAT 8, ALMERE, 1322 AP, NETHERLANDS
Covered Property
(1)
Methods for Depositing a Molybdenum Nitride Film on a Surface of a Substrate by a Cyclical Deposition Process and Related Semiconductor Device Structures Including a Molybdenum Nitride Film