Patent Assignment
Reel/Frame 053975/0357
Assignment of Assignor's Interest
Recorded: 2020-10-05
Pages: 4
Assignor
CHEN, YEN-LIANG
Executed: 2017-09-22
Assignee
TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
NO.8, LI-HSIN RD. 6, SCIENCE BASED INDUSTRIAL PARK, HSINCHU, 300, TAIWAN
Covered Property
(1)
Overlay Measurement Structures with Variable Width/Pitch for Measuring Overlay Errors