Patent Assignment
Reel/Frame 053985/0217
Assignment of Assignor's Interest
Recorded: 2020-10-06
Pages: 9
Assignors
KANAGAWA, KOUZOU
Executed: 2020-09-28
TSURUSAKI, KOTARO
Executed: 2020-09-24
ONZUKA, KEIJI
Executed: 2020-09-25
KAI, YOSHIHIRO
Executed: 2020-09-23
Assignee
TOKYO ELECTRON LIMITED
AKASAKA BIZ TOWER, 3-1 AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Substrate Processing System and Substrate Processing Method