Patent Assignment
Reel/Frame 054007/0385
Assignment of Assignor's Interest
Recorded: 2020-10-08
Pages: 3
Assignors
HSU, PEI-CHENG
Executed: 2020-08-31
LIEN, TA-CHENG
Executed: 2020-08-31
LEE, HSIN-CHANG
Executed: 2020-08-31
Assignee
TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
NO.8, LI-HSIN RD. 6, SCIENCE BASED INDUSTRIAL PARK, HSINCHU, 300, TAIWAN
Covered Property
(1)
Euv Photo Masks and Manufacturing Method Thereof