Patent Assignment
Reel/Frame 054008/0673
Assignment of Assignor's Interest
Recorded: 2020-10-08
Pages: 3
Assignors
KUMAR, SURAJIT
Executed: 2020-09-11
CHEN, HUI
Executed: 2020-09-15
CHOU, CHIH CHUNG
Executed: 2020-09-18
CHANG, SHOU-SUNG
Executed: 2020-09-18
Assignee
APPLIED MATERIALS, INC.
3050 BOWERS AVENUE, SANTA CLARA, CALIFORNIA, 95054
Covered Property
(1)
Gas Entrainment During Jetting of Fluid for Temperature Control in Chemical Mechanical Polishing