Patent Assignment
Reel/Frame 054026/0116
Assignment of Assignor's Interest
Recorded: 2020-10-12
Pages: 7
Assignee
TOKYO ELECTRON LIMITED
AKASAKA BIZ TOWER, 3-1 AKASAKA 5-CHOME, MINATO-KU, TOKYO, 1076325, JAPAN
Covered Property
(1)
Substrate Processing Apparatus with Electronic Heater Powered by Power Feeding Coil