Patent Assignment
Reel/Frame 054033/0745
Assignment of Assignor's Interest
Recorded: 2020-10-08
Pages: 3
Assignor
YAMAGUCHI, WATARU
Executed: 2020-06-17
Assignee
CANON KABUSHIKI KAISHA
30-2, SHIMOMARUKO 3-CHOME, OHTA-KU, TOKYO, 146-8501, JAPAN
Covered Property
(1)
Detection Apparatus, Exposure Apparatus, and Article Manufacturing Method