Patent Assignment
Reel/Frame 054037/0208
Assignment of Assignor's Interest
Recorded: 2020-10-13
Pages: 8
Assignors
OGAWA, SHIGEYUKI
Executed: 2020-07-30
SHIBATA, TAKUMI
Executed: 2020-07-21
TSUKAMOTO, KENTA
Executed: 2020-07-25
AKITA, KAZUO
Executed: 2020-07-21
Assignee
CANON TOKKI CORPORATION
10-1, SHINKO-CHO, NIIGATA, MITSUKE-SHI, 954-0076, JAPAN
Covered Property
(1)
Transport Carrier, Deposition Apparatus, and Electronic Device Manufacturing Apparatus