Patent Assignment
Reel/Frame 054065/0749
Assignment of Assignor's Interest
Recorded: 2020-10-15
Pages: 8
Assignors
YANG, MICHAEL X.
Executed: 2020-03-30
CHANG, HUA
Executed: 2020-03-26
XIE, TING
Executed: 2019-12-10
YANG, HAICHUN
Executed: 2020-04-07
ZHANG, QI
Executed: 2020-04-07
Assignee
MATTSON TECHNOLOGY, INC.
47131 BAYSIDE PARKWAY, FREMONT, CALIFORNIA, 94538
Covered Property
(1)
Selective Etch Process Using Hydrofluoric Acid and Ozone Gases
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.