Patent Assignment
Reel/Frame 054067/0347
Assignment of Assignor's Interest
Recorded: 2020-10-15
Pages: 3
Assignee
ASML NETHERLANDS B.V.
P.O. BOX 324, VELDHOVEN, 5500 AH, NETHERLANDS
Covered Property
(1)
Method for Determining an Electromagnetic Field Associated with a Computational Lithography Mask Model