Patent Assignment
Reel/Frame 054130/0233
Assignment of Assignor's Interest
Recorded: 2020-10-21
Pages: 8
Assignors
CHANG, TING-HSUN
Executed: 2020-04-21
YEN, HUNG
Executed: 2020-04-21
SHEN, CHI-HSIANG
Executed: 2020-04-21
HUANG, FU-MING
Executed: 2020-04-21
LIN, CHUN-CHIEH
Executed: 2020-04-21
CUI, JI
Executed: 2020-04-21
CHEN, LIANG-GUANG
Executed: 2020-05-05
CHEN, CHIH HUNG
Executed: 2020-04-21
CHEN, KEI-WEI
Executed: 2020-04-21
CHANG, TSUNG HSIEN
Executed: 2020-10-13
Assignee
TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
8, LI-HSIN RD. 6, HSINCHU SCIENCE PARK, HSINCHU, 300-78, TAIWAN
Covered Property
(1)
Chemical Mechanical Polishing Apparatus Including a Multi-Zone Platen