Patent Assignment
Reel/Frame 054132/0867
Assignment of Assignor's Interest
Recorded: 2020-10-21
Pages: 7
Assignors
HORIKOSHI, AKIRA
Executed: 2020-08-17
NAKAMURA, SHOHEI
Executed: 2020-08-19
TAKATSUJI, SHIGERU
Executed: 2020-08-17
KONO, MOTOHIRO
Executed: 2020-10-02
KIMURA, TAKAHIRO
Executed: 2020-08-17
KOBAYASHI, KENJI
Executed: 2020-08-17
Assignee
SCREEN HOLDINGS CO., LTD.
TENJINKITA-MACHI 1-1, TERANOUCHI-AGARU 4-CHOME, HORIKAWA-DORI, KAMIGYO-KU, KYOTO-SHI,, KYOTO, 602-8585, JAPAN
Covered Property
(1)
Substrate Processing Method and Substrate Processing Apparatus