Patent Assignment
Reel/Frame 054138/0657
Assignment of Assignor's Interest
Recorded: 2020-10-22
Pages: 9
Assignors
REBER, STEFAN
Executed: 2020-10-08
SCHILLINGER, KAI
Executed: 2020-10-09
REICHHART, BENJAMIN
Executed: 2020-10-09
MILENKOVIC, NENA
Executed: 2020-10-09
Assignee
NEXWAFE GMBH
HANS-BUNTE-STRASSE 19, FREIBURG, 79108, GERMANY
Covered Property
(1)
Apparatus and Method for Etching One Side of a Semiconductor Layer of a Workpiece