Patent Assignment
Reel/Frame 054139/0783
Assignment of Assignor's Interest
Recorded: 2020-10-22
Pages: 10
Assignors
CARCASI, MICHAEL
Executed: 2020-09-15
SOMERVELL, MARK
Executed: 2020-10-22
HOOGE, JOSHUA
Executed: 2020-09-18
TADOKORO, MASAHIDE
Executed: 2020-10-20
Assignee
TOKYO ELECTRON LIMITED
AKASAKA BIZ TOWER, 3-1 AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Systems and Methods for Monitoring One or More Characteristics of a Substrate