Patent Assignment
Reel/Frame 054148/0755
Assignment of Assignor's Interest
Recorded: 2020-10-23
Pages: 7
Assignors
AGIREEN, ISABEL
Executed: 2020-09-07
SCHINDLER, KATRIN, DR.
Executed: 2020-09-02
NOELL, WILFRIED, DR.
Executed: 2020-08-31
TOURNOIS, SOPHIANE
Executed: 2020-08-31
WESTENHOEFER, SUSANNE
Executed: 2020-08-31
Assignee
SUSS MICROTEC LITHOGRAPHY GMBH
SCHLEISSHEIMER STRASSE 90, GARCHING, 85748, GERMANY
Covered Property
(1)
Method and test system for assessing the quality of a multi-channel micro- and/or subwavelength-optical projection unit
Related Assignments
(2)
Other recorded transfers of the patent in this record — the chain of ownership.