Patent Assignment
Reel/Frame 054166/0541
Assignment of Assignor's Interest
Recorded: 2020-10-26
Pages: 3
Assignors
LU, CHIH WEI
Executed: 2013-05-16
LEE, CHUNG-JU
Executed: 2013-05-16
BAO, TIEN-I
Executed: 2013-05-16
Assignee
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
8, LI-HSIN RD. 6, HSINCHU SCIENCE PARK, HSINCHU, 300-78, TAIWAN
Covered Property
(1)
Structure and Method for a Low-K Dielectric With Pillar-Type Air-Gaps