Patent Assignment
Reel/Frame 054167/0931
Assignment of Assignor's Interest
Recorded: 2020-10-26
Pages: 3
Assignee
TOKYO ELECTRON LIMITED
3-1 AKASAKA 5-CHOME, MINATO-KU,, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Gas Supply System, Substrate Processing Apparatus, and Control Method for Gas Supply System