Patent Assignment
Reel/Frame 054177/0010
Assignment of Assignor's Interest
Recorded: 2020-10-27
Pages: 5
Assignors
WATANABE, KENSUKE
Executed: 2020-09-16
NISHIMURA, SHINICHI
Executed: 2020-09-16
ARITA, REN
Executed: 2020-09-16
Assignee
TOSHIBA MITSUBISHI-ELECTRIC INDUSTRIAL SYSTEMS CORPORATION
3-1-1 KYOBASHI,, CHUO-KU,, TOKYO, 1040031, JAPAN
Covered Property
(1)
Active Gas Generation Apparatus and Deposition Processing Apparatus
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.