Patent Assignment
Reel/Frame 054183/0328
Assignment of Assignor's Interest
Recorded: 2020-10-27
Pages: 2
Assignors
TSAI, YU-HSIANG
Executed: 2019-05-02
TSENG, CHUNG-CHUAN
Executed: 2019-05-02
LAI, CHIA-PING
Executed: 2019-05-02
Assignee
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
NO. 8, LI-HSIN RD. VI, HSINCHU SCIENCE PARK, HSINCHU, 300, TAIWAN
Covered Property
(1)
Method of Making a Trench Capacitor and Trench Capacitor