Patent Assignment
Reel/Frame 054193/0614
Assignment of Assignor's Interest
Recorded: 2020-10-28
Pages: 11
Assignors
SHINADA, MASATO
Executed: 2020-10-19
TOSHIMA, HIROYUKI
Executed: 2020-10-20
ABARRA, EINSTEIN NOEL
Executed: 2020-10-21
Assignee
TOKYO ELECTRON LIMITED
AKASAKA BIZ TOWER, 3-1 AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Film Formation Device and Film Formation Method