Patent Assignment
Reel/Frame 054212/0181
Assignment of Assignor's Interest
Recorded: 2020-10-29
Pages: 3
Assignor
UMISE, TAKUYA
Executed: 2020-10-19
Assignee
TOKYO ELECTRON LIMITED
3-1 AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Substrate Accommodating Unit and Maintenance Method for Vacuum Transfer Unit in Substrate Transfer Apparatus