Patent Assignment
Reel/Frame 054214/0259
Assignment of Assignor's Interest
Recorded: 2020-10-29
Pages: 5
Assignors
FENG, YE
Executed: 2019-04-12
ZHANG, YAN
Executed: 2019-05-21
SORKHABI, OSMAN
Executed: 2019-04-19
Assignee
LAM RESEARCH CORPORATION
4650 CUSHING PARKWAY, FREMONT, CALIFORNIA, 94538
Covered Property
(1)
Optical Metrology in Machine Learning to Characterize Features