Patent Assignment
Reel/Frame 054241/0792
Assignment of Assignor's Interest
Recorded: 2020-11-02
Pages: 3
Assignor
BAUMER, FLORIAN
Executed: 2020-09-23
Assignee
CARL ZEISS SMT GMBH
RUDOLF-EBER-STRASSE 2, OBERKOCHEN, 73447, GERMANY
Covered Property
(1)
Method for Restoring an Illumination System for an Euv Apparatus, and Detector Module