Patent Assignment
Reel/Frame 054272/0877
Assignment of Assignor's Interest
Recorded: 2020-11-04
Pages: 5
Assignee
TOKYO ELECTRON LIMITED
3-1 AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Method and Apparatus for Inspecting Pattern Collapse Defects