Patent Assignment
Reel/Frame 054282/0953
Assignment of Assignor's Interest
Recorded: 2020-11-05
Pages: 4
Assignors
FUNG, NANCY
Executed: 2020-10-01
LANG, CHI-I
Executed: 2020-11-03
HWANG, HO-YUNG DAVID
Executed: 2020-10-08
Assignee
APPLIED MATERIALS, INC.
3050 BOWERS AVENUE, SANTA CLARA, CALIFORNIA, 95054
Covered Property
(1)
Patterning Scheme To Improve EUV Resist And Hard Mask Selectivity