Patent Assignment
Reel/Frame 054328/0980
Assignment of Assignor's Interest
Recorded: 2020-11-10
Pages: 5
Assignors
CHEN, CHIH-CHENG
Executed: 2020-08-05
KU, SHINAN
Executed: 2020-08-05
HSU, TING-HAO
Executed: 2020-08-05
LEE, HSIN-CHANG
Executed: 2020-08-05
Assignee
TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
NO.8, LI-HSIN RD. 6, SCIENCE BASED INDUSTRIAL PARK, HSINCHU, 300, TAIWAN
Covered Property
(1)
Method of Fast Surface Particle and Scratch Detection for Euv Mask Backside