Patent Assignment
Reel/Frame 054331/0147
Assignment of Assignor's Interest
Recorded: 2020-11-11
Pages: 3
Assignors
NIIZEKI, TOMOHIKO
Executed: 2020-11-04
KATSUNUMA, TAKAYUKI
Executed: 2020-11-05
KIHARA, YOSHIHIDE
Executed: 2020-11-05
TOMURA, MAJU
Executed: 2020-11-04
Assignee
TOKYO ELECTRON LIMITED
3-1 AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Method for Etching Film and Plasma Processing Apparatus