Patent Assignment
Reel/Frame 054346/0771
Assignment of Assignor's Interest
Recorded: 2020-11-12
Pages: 2
Assignee
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
NO. 8, LI-HSIN RD. 6, HSINCHU SCIENCE PARK, 300-78, 300-78, TAIWAN
Covered Property
(1)
System for Cleaning Wafer in Cmp Process of Semiconductor Manufacturing Fabrication