Patent Assignment
Reel/Frame 054388/0165
Assignment of Assignor's Interest
Recorded: 2020-11-17
Pages: 8
Assignors
YAMAUCHI, TAKASHI
Executed: 2020-11-06
KAWAKAMI, SHINICHIRO
Executed: 2020-11-16
ENOMOTO, MASASHI
Executed: 2020-11-04
Assignee
TOKYO ELECTRON LIMITED
3-1 AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Substrate Processing Method, Substrate Processing Apparatus, and Computer Readable Recording Medium