Patent Assignment
Reel/Frame 054429/0937
Assignment of Assignor's Interest
Recorded: 2020-11-20
Pages: 4
Assignors
ISHIKAWA, AKIRA
Executed: 2020-10-28
OKUBO, ATSUSHI
Executed: 2020-10-29
ONO, YOSUKE
Executed: 2020-10-29
KOHMURA, KAZUO
Executed: 2020-10-29
Assignee
MITSUI CHEMICALS, INC.
5-2, HIGASHI-SHIMBASHI 1-CHOME, MINATO-KU, TOKYO, 105-7122, JAPAN
Covered Property
(1)
Pellicle Support Frame, Pellicle, Method for Manufacturing Pellicle Support Frame, and Exposure Original Plate and Exposure Device Employing Pellicle