Patent Assignment
Reel/Frame 054446/0669
Assignment of Assignor's Interest
Recorded: 2020-11-23
Pages: 2
Assignee
L'AIR LIQUIDE, SOCIÉTÉ ANONYME POUR L'ETUDE ET L'EXPLOITATION DES PROCÉDÉS GEORGES CLAUDE
75 QUAI D'ORSAY, PARIS, F-75007, FRANCE
Covered Property
(1)
Method of Improving Step Coverage Using an Inhibitor Molecule for High Aspect Ratio Structures