Patent Assignment
Reel/Frame 054453/0289
Assignment of Assignor's Interest
Recorded: 2020-11-24
Pages: 4
Assignors
KUBOTA, SHINJI
Executed: 2020-11-11
NAGASEKI, KAZUYA
Executed: 2020-11-11
HIMORI, SHINJI
Executed: 2020-11-11
NAGAMI, KOICHI
Executed: 2020-11-11
Assignee
TOKYO ELECTRON LIMITED
3-1 AKASAKA 5-CHOME,, MINATO-KU,, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Plasma Processing Method and Plasma Processing Apparatus