Patent Assignment
Reel/Frame 054457/0112
Assignment of Assignor's Interest
Recorded: 2020-11-24
Pages: 11
Assignors
IHARA, TORU
Executed: 2020-11-10
GOSHI, GENTARO
Executed: 2020-11-19
YAMASHITA, MASAMI
Executed: 2020-11-11
Assignee
TOKYO ELECTRON LIMITED
3-1, AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Substrate Processing Apparatus and Substrate Processing Method