Patent Assignment
Reel/Frame 054468/0861
Assignment of Assignor's Interest
Recorded: 2020-11-25
Pages: 5
Assignor
MATSUYAMA, SHOICHIRO
Executed: 2020-11-25
Assignee
TOKYO ELECTRON LIMITED
3-1, AKASAKA 5-CHOME, MINATO-KU,, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Edge Ring and Substrate Processing Apparatus