Patent Assignment
Reel/Frame 054485/0346
Assignment of Assignor's Interest
Recorded: 2020-11-30
Pages: 3
Assignors
MAASSEN, MARTINUS
Executed: 2015-11-13
PLUG, REINDER TEUN
Executed: 2015-11-12
BHATTACHARYYA, KAUSTUVE
Executed: 2015-11-16
Assignee
ASML NETHERLANDS B.V.
P.O. BOX 324, VELDHOVEN, 5500 AH, NETHERLANDS
Covered Property
(1)
Method and Apparatus for Predicting Performance of a Metrology System