Patent Assignment
Reel/Frame 054499/0425
Assignment of Assignor's Interest
Recorded: 2020-12-01
Pages: 6
Assignors
WANG, JEN-SHIANG
Executed: 2018-08-08
LU, YEN-WEN
Executed: 2018-08-01
GUO, YUNBO
Executed: 2018-08-08
FENG, MU
Executed: 2018-08-08
ZHANG, QIANG
Executed: 2018-08-08
ZHAO, QIAN
Executed: 2018-08-08
Assignee
ASML NETHERLANDS B.V.
P.O. BOX 324, VELDHOVEN, 5500 AH, NETHERLANDS
Covered Property
(1)
Method for Improving a Process for a Patterning Process