Patent Assignment
Reel/Frame 054569/0001
Assignment of Assignor's Interest
Recorded: 2020-12-07
Pages: 5
Assignors
WANG, WEN-YUN
Executed: 2018-04-18
LIN, HUA-TAI
Executed: 2018-04-18
LIU, CHIA-CHU
Executed: 2018-04-18
Assignee
TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
NO.8, LI-HSIN RD. 6, SCIENCE BASED INDUSTRIAL PARK, HSINCHU, 300, TAIWAN
Covered Property
(1)
Method for Manufacturing Semiconductor Device and System for Performing the Same